Sensor and Actuator Structures and Technologies in LMSE

About the training:

The Laboratory of Microsensor Structures and Electronics (LMSE) at the Faculty of Electrical Engineering, University of Ljubljana, covers a comprehensive spectrum ranging from theoretical analysis and technological fabrication to the final characterization of advanced semiconductor structures, microsensors, and microwave and sensor electronics. The training will highlight key structures and technological achievements, including silicon planar technology and cleanroom processing (ISO class 5), DRIE silicon microfabrication, silicon photodiode and optical PSD sensors, X-ray detectors for mammography, piezoresistive and mechanical stress sensors (SSMN), microfluidic and Lab-on-a-Chip (LOC) systems, micro-energy and thermal systems (catalytic microreactors and micro-thermocyclers), as well as dedicated pneumatic MEMS microvalves and oceanographic CTD instruments.

Prerequisites:

None

Language: Slovenian

When: 24.9.2026 at 9:00 AM

Where: University of Ljubljana, Faculty of Electrical Engineering, Tržaška 25, Ljubljana

Overview of the Programme (detailed program will be published soon)
  • Silicon planar technology, materials processing, and Deep Reactive Ion Etching (DRIE)
  • Silicon photodiode sensors and 1D/2D optical position-sensitive detectors (PSD).
  • Radiation and biomedical detectors (X-ray sensors for mammography).
  • Piezoresistive, pressure, and mechanical stress sensors (SSMN).
  • Microfluidic structures, Lab-on-a-Chip (LOC) systems, and microneedles.
  • Micro-energy and thermal systems (catalytic microreactors and micro-thermocyclers).
  • Dedicated pneumatic MEMS microvalves and oceanographic CTD instruments.

Learning Outcomes

Understanding of advanced microfabrication processes, characterization methods, and practical applications of silicon-based sensors, MEMS, and microfluidic structures.

Additional Information:

Cost: Free of charge

Organizer:

CC-Chip.si in collaboration with The Laboratory of Microsensor Structures and Electronics (LMSE) at the Faculty of Electrical Engineering, University of Ljubljana

Registration:

Until full registration capacity is reached.

Contact:

For all additional infomration please contact CC Chip.si main office by email: office@cc-chip.si

OTHERS

MOGOČE VAS ZANIMA TUDI...

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UNIVERSITIES AND RTOs of CC CHIP.SI

Univerza v Ljubljani
UL FE & UL FRI
• cleanroom facilities sub-micron (Bi)CMOS
• mixed signal ASIC design, FPGA, RISC
• THz sensors and arrays, MEMS
• Si based photonic integrated circuits

University of Maribor
FERI
• mixed signal ASIC design (flight-proven chips)
• advanced waveguide and fiber sensor solutions
• micromachining technologies, MEMS, MOEMS

 

University of Nova Gorica
• organic electronics
• graphene based devices
• electro-optical characterization

Institut Jožef Stefan
• material research
• radiation detectors
• quantum technology
• thin-film chip related technologies
• ASIC design

CoE Nanoscience & Nanotechnology
Nanocenter
• nanofabrication facilities
• advanced quantum devices (supercond. transmon qubits)
• energy-efficient ultra fast memory (cryo, quantum)

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