INTERCHIP Training: Hands-on MEM microfabrication in cleanroom environment

When: June 23th – June 24th, 2026

application deadline: 31st March, 2026

Where: Organised by MC2, Dept. of Microtechnology and Nanoscience, Chalmers University of Technology, Göteborg, Sweden & GOMOD AB (Sweden)

About the training:

Microfabrication and electrical characterization (S-parameters) of a MEM piezoelectric device microfabrication in the tools and facilities at the department of Microtechnology and Nanoscience (MC2) in Chalmers University of Technology. Several common microfabrication steps will be addressed like maskless lithography, PVD deposition, spin-coating of resist, sputtering, dicing, among others. Moreover, a VNA (Vector Network Analyzer) will be used by the students to perform the electrical characterization of the such devices. At the end of the training, attendees should have learned about:

  • Basic cleanroom-process practical knowledge to fabricate a RF MEM device based on the piezoelectric effect
  • Practical measurement of their device and their fundamental theory of the S-parameters
  • Practical foundations of optical lithography exposure, development, PVD, dicing and electrical measurements.

The training is intended for:

Learn more tukaj.

OTHERS

MOGOČE VAS ZANIMA TUDI...

Lorem ipsum

UNIVERSITIES AND RTOs of CC CHIP.SI

University of Ljubljana
UL FE & UL FRI
• cleanroom facilities sub-micron (Bi)CMOS
• mixed signal ASIC design, FPGA, RISC
• THz sensors and arrays, MEMS
• Si based photonic integrated circuits

University of Maribor
FERI
• mixed signal ASIC design (flight-proven chips)
• advanced waveguide and fiber sensor solutions
• micromachining technologies, MEMS, MOEMS

 

University of Nova Gorica
• organic electronics
• graphene based devices
• electro-optical characterization

Jožef Stefan Institute
• material research
• radiation detectors
• quantum technology
• thin-film chip related technologies
• ASIC design

CoE Nanoscience & Nanotechnology
Nanocenter
• nanofabrication facilities
• advanced quantum devices (supercond. transmon qubits)
• energy-efficient ultra fast memory (cryo, quantum)

Newsletter

Prejemajte tedenske novosti