When: June 23th – June 24th, 2026
application deadline: 31st March, 2026
Where: Organised by MC2, Dept. of Microtechnology and Nanoscience, Chalmers University of Technology, Göteborg, Sweden & GOMOD AB (Sweden)
About the training:
Microfabrication and electrical characterization (S-parameters) of a MEM piezoelectric device microfabrication in the tools and facilities at the department of Microtechnology and Nanoscience (MC2) in Chalmers University of Technology. Several common microfabrication steps will be addressed like maskless lithography, PVD deposition, spin-coating of resist, sputtering, dicing, among others. Moreover, a VNA (Vector Network Analyzer) will be used by the students to perform the electrical characterization of the such devices. At the end of the training, attendees should have learned about:
- Basic cleanroom-process practical knowledge to fabricate a RF MEM device based on the piezoelectric effect
- Practical measurement of their device and their fundamental theory of the S-parameters
- Practical foundations of optical lithography exposure, development, PVD, dicing and electrical measurements.
The training is intended for:
Learn more here.


